Перегляд за автором "Dudin, S."

Сортувати за: Порядок: Результатів:

  • Comparative study of positive and negative ion flows extracted from downstream plasmas beyond magnetic and electrostatic electron filters 
    Dudin, S.; Rafalskyi, D.; Popelier, L.; Aanesland, A. (Физическая инженерия поверхности, 2012)
    In the present paper we compare the positive and negative ion flows created using a recently developed electrostatic grid-type filter with the flows formed using a magnetic filter. Langmuir probe measurements show electron ...
  • Design and research of combined magnetron-ion-beam sputtering system 
    Dudin, S.; Tkachenko, O.; Shchybria, A.; Yakovin, S.; Zykov, A.; Yefymenko, N. (Вопросы атомной науки и техники, 2018)
    The design and characteristics of a new combined magnetron-ion-beam sputtering system are presented. The system allows coating deposition both by means of magnetron discharge, and by sputtering of complex composite targets ...
  • Discharge characteristics of combined low energy ion source – magnetron sputtering system 
    Zykov, A.; Yefymenko, N.; Dudin, S.; Yakovin, S. (Вопросы атомной науки и техники, 2020)
    The discharge characteristics of a new combined low energy magnetron-ion-source sputtering system are presented. The ignition curves, current-voltage characteristics of the system in dependence on gas pressure, magnitude ...
  • Double magnetron cluster set-up for synthesis of micro and nano structure coatings 
    Yakovin, S.; Zykov, A.; Dudin, S.; Sergiec, M.; Farenik, V. (Вопросы атомной науки и техники, 2015)
    In the present paper, the results studying the technological regimes of reactive magnetron sputtering in cluster set-up with two planar magnetrons, plasma source and medium energy ion source are presented. Magnetron ...
  • Investigation of interaction between ion-beam plasma and processed surface during the synthesis of tantalum diboride and pentaoxide 
    Yakovin, S.; Zykov, A.; Dudin, S.; Dakhov, A.; Yefymenko, N. (Вопросы атомной науки и техники, 2019)
    The paper is devoted to investigation of spatial distributions of ion current density to a sample in technological set-up with magnetron sputtering system and ICP source. The dependence of the ion flux towards the processed ...
  • Kinetic simulaton of CO₂ conversion in low-pressure electrodeless plasma 
    Dudin, S.; Lisovskiy, V.; Platonov, P.; Rezunenko, S. (Problems of Atomic Science and Technology, 2022)
    Kinetic model of processes in low-pressure inductively coupled plasma describing the carbon dioxide conversion is presented together with the modeling results. The model takes into account only direct electron impact ...
  • Optical and mass spectra from reactive plasma at magnetron deposition of tantalum oxynitride 
    Dudin, S.; Yakovin, S.; Zykov, A.; Yefymenko, N. (Вопросы атомной науки и техники, 2021)
    Processes in reactive plasma during the magnetron deposition of tantalum oxynitride with ICP activation of reactive gas are studied in dependence on Oxygen fraction. Results of spectroscopic study of optical emission from ...
  • Plasma assisted deposition of TaB₂ coatings by magnetron sputtering system 
    Yakovin, S.; Zykov, A.; Dudin, S.; Farenik, V.; Goncharov, A.; Shelest, I.; Kuznetsov, V. (Вопросы атомной науки и техники, 2017)
    In the present paper the results of TaB₂ coating deposition in cluster set-up comprising a low pressure planar magnetron and an inductive plasma source are presented. The system allows to control independently the fluxes ...
  • Simulation of capacitively coupled RF discharge in argon 
    Lisovskiy, V.; Dudin, S.; Shakhnazarian, A.; Platonov, P.; Yegorenkov, V. (Problems of Atomic Science and Technology, 2023)
    In this work, the axial profiles of the density of electrons and positive ions, the mean electron energy, the electric field strength, and the potential were obtained, both on average over the period and in dynamics. It ...
  • Synthesis of thin-film Ta₂O₅ coatings by reactive magnetron sputtering 
    Yakovin, S.; Zykov, A.; Dudin, S.; Yefymenko, N. (Вопросы атомной науки и техники, 2016)
    The investigation results of optimal conditions for synthesis of thin-film tantalum oxide dielectric coatings using the cluster multipurpose setup are presented. The set-up consist of DC magnetron, ICP source, and ...
  • Technological aprobation of integral cluster setup for complex compound composites syntesis 
    Yakovin, S.; Dudin, S.; Zykov, A.; Shyshkov, A.; Farenik, V. (Вопросы атомной науки и техники, 2012)
    In the present paper the results of technological approbation of the integral cluster set-up for synthesis of various types of high-quality coatings such as Al₂O₃, TiO₂, ZrO₂, AlN, TiN, and others with coating thickness ...
  • The antimicrobial activity of magnetron sputtered Ag doped aluminum oxide coatings in vitro 
    Safonov, V.; Donkov, N.; Zykova, A.; Avramov, L.; Dudin, S.; Yakovin, S.; Naidenski, H.; Avramova, I. (Вопросы атомной науки и техники, 2019)
    The effect of Ag-doped aluminium oxide coatings deposited by magnetron sputtering method on the antibacterial efficiency against Gram-positive, Gram-negative bacteria and fungi has been investigated. The structure and ...